INFICON vacuum gauges are instruments used to measure gas pressure in the high vacuum range (within the range of low air density, lower than atmospheric pressure). The operating principle is based on collisions between gas molecules and surfaces, as well as the motion characteristics of gas molecules under vacuum conditions.

There are various types of these instruments, operating on different principles such as thermal electron and cathode ray ion flow, high flow absorption, volumetric pressure measurement, and vibration methods. Different vacuum gauges have distinct characteristics and advantages and disadvantages, allowing for the selection of the most suitable instrument based on specific needs.

The basic principle of the INFICON vacuum gauge involves two electrodes, one being the anode (cathode ray tube or electron gun) and the other being the cathode (receiver). When a high voltage is applied, the anode emits an electron beam that collides with gas molecules in the vacuum region, ionizing them and generating electron-ion pairs. These ion pairs move under the influence of the electric field, creating a current on the cathode surface.

By employing different electrode structures and circuit designs, vacuum gauges can achieve varying measurement ranges and sensitivities. For instance, thermal cathode vacuum gauges utilize the principle of thermionic emission to generate electrons in the vacuum region, calculating gas pressure through collisions between electrons and gas molecules. On the other hand, cold cathode vacuum gauges measure pressure through gas adsorption and desorption on the cathode surface, offering higher sensitivity than thermal cathode vacuum gauges and suitable for a wider range of measurements.

In summary, INFICON vacuum gauges find widespread applications in various fields, including solar cell production, materials research in the microelectronics sector, semiconductor manufacturing facilities, and aerospace manufacturing plants. Different vacuum gauges exhibit different features such as measurement range, volume, and sensitivity. Therefore, when selecting and using vacuum gauges, it is essential to evaluate based on specific requirements to choose the most suitable instrument.